激光准直仪(AlignMeter USB)

型号

AlignMeter – 50

AlignMeter – 100

透镜焦距

50mm

100mm

位置分辨率

Down to 0.1µm at 50Hz digital
filter+Averaging

Down to 0.1µm at 50Hz digital
filter+Averaging

位置精确度

±15µm edge-to-edge (±8µm)

±15µm edge-to-edge (±8µm)

角度测量范围

180 mRad (90 mRad)

80 mRad (40 mRad)

角度分辨率

0.02 mRad (0.01 mRad)

0.01 mRad (0.006 mRad)

角度精确度

0.5 mRad edge-to-edge (0.01 mRad)

0.25 mRad edge-to-edge (0.15 mRad)

重量

140 Gr. Excluding cables

180 Gr. Excluding cables